欢迎登录材料期刊网

材料期刊网

中国科学院金属研究所 科学出版社
高级检索
  1. 首页
  2. 期刊
  3. 材料导报
  4. 太阳电池用绒面ZnO-TCO薄膜制备技术及特性的研究进展

材料导报, 2009, 23(9): 98-112.

太阳电池用绒面ZnO-TCO薄膜制备技术及特性的研究进展

陈新亮 1, , 薛俊明 2, , 赵颖 3, , 耿新华 4,

1.南开大学光电子薄膜器件与技术研究所,光电子薄膜器件与技术天津市重点实验室,南开大学光电信息技术科学教育部重点实验室,天津,300071

2.南开大学光电子薄膜器件与技术研究所,光电子薄膜器件与技术天津市重点实验室,南开大学光电信息技术科学教育部重点实验室,天津,300071

3.南开大学光电子薄膜器件与技术研究所,光电子薄膜器件与技术天津市重点实验室,南开大学光电信息技术科学教育部重点实验室,天津,300071

4.南开大学光电子薄膜器件与技术研究所,光电子薄膜器件与技术天津市重点实验室,南开大学光电信息技术科学教育部重点实验室,天津,300071

基金项目:   天津市科技攻关项目(06YFGZGX02100)   博士启动基金(J02048)   国家重点基础研究发展规划(973计划)(2006CB202602;2006CB202603)  

关键词： ZnO薄膜 , 透明导电氧化物-TCO , 绒面结构 , 薄膜太阳电池

Research Progress of Growth Technology and Characteristics for Textured ZnO-TCO Thin Films Applied in Solar Cells

概括阐述了薄膜太阳电池用绒面结构ZnO透明导电薄膜(ZnO-TCO)方面的最新研究进展.绒面结构ZnO-TCO薄膜可以提高薄膜太阳电池效率和稳定性并降低生产成本.磁控溅射技术和MOCVD(Lp-MOCVD/LPCVD)技术是制备绒面结构ZnO-TCO薄膜(例如"弹坑"状和"类金字塔"状表面)的主流生长技术,而喷雾热分解技术则是正在开发的非真空法低成本工艺路线.论述了2种主流技术生长ZnO-TCO薄膜的发展历程,并重点讨论了近期关于绒面ZnO-TCO薄膜微观结构、电学以及光学等特性与工艺关系的研究结果.进一步降低成本和实现大面积产业化是绒面ZnO-TCD薄膜拓展应用的发展趋势.

参考文献

[1] 赵玉文.我国光伏产业发展概况及思考[A].常州,2008:3.
[2] Major S;Kumar Satyendra;Bhatnagar M et al.Effect of hydrogen plasma treatment on stransparent conducting oxides[J].Applied Physics Letters,1986,49:394.
[3] Shah A V;Scbade H;Vanecek M et al.Thin-film silicon solar cell technology[J].PROGRESS IN PHOTOVOLTAICS,2004,12:113.
[4] Muller J;Rech B;Springer J et al.TCO and light trapping in silicon thin film solar cells[J].Journal of Solar Energy Engineering,2004,77:917.
[5] Kluth O;Rech B;Houben L et al.Texture etched ZnO Al coated glass substrates for silicon based thin film solar cells[J].Thin Solid Films,1999,351:247.
[6] Muiller J;Schope G;Kluth O.Upscaling of textureetched zinc oxide substrates for silicon thin film solar cells[J].Thin Solid Films,2001:3921327.
[7] Muller J.;Wieder S.;Siekmann H.;Schope G.;Reetz W.;Vetterl O.;Lundszien D.;Lambertz A.;Finger F.;Rech B.;Wagner H.;Kluth O. .Development of highly efficient thin film silicon solar cells on texture-etched zinc oxide-coated glass substrates[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2001(1/4):275-281.
[8] Yoo Jinsu;Lee Jeonghul;Kim Seokki et al.High transmittance and low resistive ZnO,AI films for thin film solar cells[J].Thin Solid Films,2005,480-481:213.
[9] Hupkes J;Rech B;Kluth O;Repmann T;Zwaygardt B;Muller J;Drese R;Wuttig M .Surface textured MF-sputtered ZnO films for microcrystalline silicon-based thin-film solar cells[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2006(18/19):3054-3060.
[10] Hupkes J;Rech B;Calnan S;Kluth O;Zastrow U;Siekmann H;Wuttig M .Material study on reactively sputtered zinc oxide for thin film silicon solar cells[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2006(1/2):286-291.
[11] Berginski M;Hupkes J;Schulte M et al.The effect of front ZnO:Al surface texture and optical transparency on efficient light trapping in silicon thin-film solar celis[J].Journal of Applied Physics,2007,101:74903.
[12] Wenas Wilson W;Yamada Akira;Takahashi Kiyoshi.Electrical and optical properties of boron-doped ZnO thin films for solar cells grown by metalorganie chemical vapor deposition[J].Journal of Applied Physics,1991:70-7119.
[13] Yoshino Masahiro;Wenas Wilson W;Yamada Akira et al.Large-area ZnO thin films for solar cells prepared by photoinduced metalorganie chemical vapor deposition[J].Japanese Journal of Applied Physics,1993,32:729.
[14] Highly stable and textured hydrogenated ZnO thin films[J].Applied physics letters,2003(18):3026-3028.
[15] Fay S;Kroll U;Bucher C;Vallat-Sauvain E;Shah A .Low pressure chemical vapour deposition of ZnO layers for thin-film solar cells: temperature-induced morphological changes[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2005(3):385-397.
[16] Fay S;Feitknecht L;Schluchter R;Kroll U;Vallat-Sauvain E;Shah A .Rough ZnO layers by LP-CVD process and their effect in improving performances of amorphous and microcrystalline silicon solar cells[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2006(18/19):2960-2967.
[17] Fay S;Steinhauser J;Oliveira N;Vallat-Sauvain E;Ballif C .Opto-electronic properties of rough LP-CVD ZnO : B for use as TCO in thin-film silicon solar cells[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2007(24):8558-8561.
[18] Chen XL;Geng XH;Xue JM;Zhang DK;Hou GF;Zhao Y .Temperature-dependent growth of zinc oxide thin films grown by metal organic chemical vapor deposition[J].Journal of Crystal Growth,2006(1):43-50.
[19] Chen XL;Geng XH;Xue JM;Li LN .Two-step growth of ZnO films with high conductivity and high roughness[J].Journal of Crystal Growth,2007(1):77-81.
[20] 陈新亮,薛俊明,孙建,赵颖,耿新华.绒面ZnO薄膜的生长及其在太阳电池前电极的应用[J].半导体学报,2007(07):1072-1077.
[21] Szyszka B .Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering[J].Thin Solid Films,1999,351:164.
[22] May C.;Menner R.;Strumpfel J.;Oertel M.;Sprecher B. .Deposition of TCO films by reactive magnetron sputtering from metallic Zn : Al alloy targets[J].Surface & Coatings Technology,2003(0):512-516.
[23] Oerlikon Solar发展薄膜太阳能电池透明导电层之设备[EB/OL].世界材料网,2007-07-02.
[24] Sittinger V;Ruske F;Werner W;Szyszka B;Rech B;Hupkes J;Schope G;Stiebig H .ZnO : Al films deposited by in-line reactive AC magnetron sputtering for a-Si : H thin film solar cells[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2006(1):16-25.
[25] Agashe C;Kluth O;Htipkes J et al.Efforts to improve carrier mobility in radio frequency sputtered aluminum doped zinc oxide films[J].Journal of Applied Physics,2004,95:1911.
[26] Anna Selvan J A .ZnO for thin film solar cells[D].Germany:University of Neuchatel,1997.
[27] Anna Selvan J A;Delahoy Alan E;Guo Sheyu et al.A new light trapping TCO for nc-Si.H solar cells[J].Solar Energy Materials and Solar Cells,2006,90:3371.
[28] Ruske F;Jacobs C;Sittinger V;Szyszka B;Werner W .Large area ZnO: Al films with tailored-light scattering properties for photovoltaic applications[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2007(24):8695-8698.
[29] Berginski M;Hupkes J;Reetz W et al.Recent development on surface-textured ZnO:A1 films prepared by sputtering for thin-film solar cell application[J].Thin Solid Films,2008,516:5836.
[30] Yoshino M;Wenas W W;Yamada A et al.Large-area ZnO thin films for solar cells prepared by photo-induced metalorganic chemical vapor deposition[J].Japanese Journal of Applied Physics,1993,32:726.
[31] Sang B.;Konagai M.;Yamada A. .GROWTH OF BORON-DOPED ZNO THIN FILMS BY ATOMIC LAYER DEPOSITION[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,1997(1/4):19-26.
[32] Yamamoto Y.;Takahashi K.;Konagai M.;Saito K. .Preparation of boron-doped ZnO thin films by photo-atomic layer deposition[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2001(1/4):125-132.
[33] Chen X L;Xu B H;Xue J M et al.Boron-doped ZnO thin films for large-ares solar cells grown by MOCVD technique[J].Thin Solid Films,2007,515:3753.
[34] 陈新亮,薛俊明,张德坤,蔡宁,张晓丹,赵颖,耿新华.绒面结构ZnO薄膜及其表面处理[J].人工晶体学报,2008(03):631-633.
[35] Addonizio ML;Diletto C .Doping influence on intrinsic stress and carrier mobility of LP-MOCVD-deposited ZnO : B thin films[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2008(11):1488-1494.
[36] Myong SY;Steinhauser J;Schluchter R;Fay S;Vallat-Sauvain E;Shah A;Ballif C;Rufenacht A .Temperature dependence of the conductivity in large-grained boron-doped ZnO films[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2007(14):1269-1274.
[37] Steinhauser J;Fay S;Oliveira N et al.Transition between grain boundary and intragrain scattering transport mechanisms in boron-doped zinc oxide thin films[J].Applied Physics Letters,2007,90:142107.
[38] Bailat J;Damine D;Schluchter R.High-efficiency PI-N microcrystalline and micromorph thin film silicon solar cells deposited on LPCVD ZnO coated glass substrates[A].Waikoloa,Hawaii,USA,2006:1465.
[39] Python, M;Vallat-Sauvain, E;Bailat, J;Domine, D;Fesquet, L;Shah, A;Ballif, C .Relation between substrate surface morphology and microcrystalline silicon solar cell performance[J].Journal of Non-Crystalline Solids,2008(19/25):2258-2262.
[40] 陈新亮,张德坤,薛俊明,孙建,赵颖,耿新华.种子层诱导法低温生长绒面结构ZnO薄膜[C].第十届中国太阳能光伏会议论文集,2008:468-471.
[41] Kajikawa Y .Texture development of non-epitaxial polycrystalline ZnO films[J].Journal of Crystal Growth,2006(1):387-394.
[42] Chen Xinliang et al.Effect of Boron-doping on plane zinc oxide thin films grown by metal organic chemical vapor deposition[J].Journal of the Synthetic Crystals,2008,37:997.
[43] Wienke J;van der Zanden B;Tijssen M;Zeman M .Performance of spray-deposited ZnO : In layers as front electrodes in thin-film silicon solar cells[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2008(8):884-890.
[44] Maldonado A.;Canetas-Ortega J.;Zironi E.P.;Hernandez R.;Patino R.;Solorza-Feria O.;Asomoza R. .Effect of the pH on the physical properties of ZnO:In thin films deposited by spray pyrolysis[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,1999(4):331-344.
[45] Gómez H;Maldonado A;Castanedo-Pére z R et al.Properties of Al-doped ZnO thin films deposited by a chemical spray process[J].Mater Charaet,2007,58:708.
[46] Szyszka B.;Sittinger V.;Jiang X.;Hong RJ.;Werner W.;Pflug A.;Ruske M.;Lopp A. .Transparent and conductive ZnO : Al films deposited by large area reactive magnetron sputtering[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2003(1/2):179-183.
[47] Lee Jaehyeong;Lee Dongjin;Lira Donggun et al.Structural,electrical and optical properties of ZnO:Al films deposited on flexible organic substrates for solar cell applications[J].Thin Solid Films,2007,15:6094.
[48] Banerjee AN;Ghosh CK;Chattopadhyay KK;Minoura H;Sarkar AK;Akiba A;Kamiya A;Endo T .Low-temperature deposition of ZnO thin films on PET and glass substrates by DC-sputtering technique[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2006(1):112-116.
[49] Fonrodona M;Escarre J;Villar F;Soler D;Asensi JM;Bertomeu J;Andreu J .PEN as substrate for new solar cell technologies[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2005(1):37-47.
[50] Pei Z L;Zhang X B;Zhang G P et al.Transparent conductive ZnO:AI thin films deposited on flexible substrates prepared by direct current magnetron sputtering[J].Thin Solid Films,2006,497:20.
[51] Soderstr6m T;Hang F T;Terrazzoni-Daudrix T et al.Optimization of amorphous silicon thin film solar cells for flexible photovoltaics[J].Journal of Applied Physics,2008,103:114509.
[52] 李华,夏爱民.中国光伏产业发展战略思考[C].第十届中国太阳能光伏会议论文集,2008:998-1000.
上一张 下一张
上一张 下一张
计量
  • 下载量()
  • 访问量()
作者相关
文章评分
  • 您的评分：
  • 1
    0%
  • 2
    0%
  • 3
    0%
  • 4
    0%
  • 5
    0%

版权所有©2010中国科学院金属研究所中国科技出版传媒股份有限公司

本系统由北京仁和汇智信息技术有限公司设计开发

技术支持：info@rhhz.net