简要综述了铁电薄膜在铁电存储器、MEMS系统、微波器件、光电器件等几个方面的典型应用,并对国内铁电薄膜的研究及发展作了概述.
参考文献
| [1] | 张学福.现代压电学(中册)[M].北京:科学出版社,2002:216. |
| [2] | 张学福.现代压电学(下册)[M].北京:科学出版社,2002:513. |
| [3] | Ali Sheikholeslami;P. Glenn Gulak .A survey of circuit innovations in ferroelectric random-access memories[J].Proceedings of the IEEE,2000(5):667-689. |
| [4] | 岳云.铁电随机存取存储器技术的发展近况[J].今日电子,2003(02):25-28. |
| [5] | Kinam Kim;Yoon J. Song .Integration technology for ferroelectric memory devices[J].Microelectronics and reliability,2003(3):385-398. |
| [6] | 肖定全.铁电薄膜研究中的几个重要问题[J].功能材料,2003(05):479-481. |
| [7] | Chia-HsingHuang;Yi-Kai Wang;Hang-Ting Lue et al.Memory properties of metal/ferroelectric/semiconductor and metal/ferroelectric/insulator/semiconductor structures using rf sputtered ferroelectric Sr08 Bi25 Ta12 Nb08 O9 thin films[J].Journal of the European Ceramic Society,2004,24:2471. |
| [8] | Yang CH.;Wang Z.;Xu HY.;Sun ZH.;Jiang FY.;Han JPZJR. .Preparation and main characteristics of lead-free K0.5Bi0.5TiO3 ferroelectric thin films[J].Journal of Crystal Growth,2004(1/4):304-307. |
| [9] | RameshR;Aggarwal S;Auciello O .Scienceandtechnologyofferroelectricfilmsandheterostructuresfornon-volatileferroelectricmemories[J].Materials Science and Engineering,2001,32:191. |
| [10] | Won-JeongKim;Sang Su Kim;Kiwan Jang et al.Ferroelec tric Bi3 4Eu06Ti3O12thin films deposited on Si 100 and Pt/-gel process[J].Crystal/SiO2/Si(100)substrates by a sol Ti Growth,2004,262:327. |
| [11] | Xiaohong Zhu;Wei Peng;Jun Miao .Fabrication and characterization of tunable dielectric Ba_(0.5)Sr_(0.5)TiO_3 thin films by pulsed laser deposition[J].Materials Letters,2004(14):2045-2048. |
| [12] | 符春林,杨传仁,陈宏伟,胡文成,李文远.钛酸锶钡（BST）薄膜的制备与应用研究进展[J].电子元件与材料,2003(05):47-50. |
| [13] | 黄维宁,姜国宝,林殷茵,汤庭鳌.铁电存储器中Pb（Zr,Ti）O3集成铁电电容的制备[J].固体电子学研究与进展,2003(01):112-115. |
| [14] | WhatmoreRW;Zhang Q;Huang Z et al.Ferroelectricthinandthickfilmsformicrosystems[J].Materials Science in Semiconductor Processing,2003,5:65. |
| [15] | ShinHyunjung;Hong Seungbum;Moon Jooho et al.Read/writemechanismsanddatastoragesystemusingatomicforcemicroscopyandMEMStechnology[J].Ultramicroscopy,2002,91:103. |
| [16] | TakeshiMorita;Minoru Kurosawa;Toshiro Higuchi .AnultrasonicmicromotorusingabendingcylindricaltransducerbasedonPZTthinfilm[J].Sensors and Actuators A:Physical,1995,50:75. |
| [17] | Zhang QQ.;Gross SJ.;Tadigadapa S.;Jackson TN.;Djuth FT. Troher-McKinstry S. .Lead zirconate titanate films for d(33) mode cantilever actuators[J].Sensors and Actuators, A. Physical,2003(1):91-97. |
| [18] | Kohli M.;Brooks K.;Willing B.;Forster M.;Muralt P. Setter N.;Ryser P.;Wuethrich C. .PYROELECTRIC THIN-FILM SENSOR ARRAY[J].Sensors and Actuators, A. Physical,1997(1/3):147-153. |
| [19] | TakayukiShiata;Kazuya Unno;Eiji Makino.FabricationandcharacterizationofdiamondAFMprobeintegratedwithPZTthinfilmsensorandactuator[J].Sensors and Actuators A-physical,2004 |
| [20] | Antoni Rogalski .Infrared detectors: status and trends[J].Progress in Quantum Electronics,2003(2/3):59-210. |
| [21] | FuXiaorong et al.Preparationofhighly100-orientedPLCTthinfilmsonPt/Ti/SiO2/Sisubstratesbyasimplesol-gelprocess[J].Materials Letters,2000,44:70. |
| [22] | LiuDonhang;Chen Haydn et al.Low-temperaturepreparationofperovskitePbSc05Ta05O3thinfilmsusingMOCVD[J].Materials Letters,1996,28:17. |
| [23] | 闵乃本.介电体超晶格与微结构研究[J].自然科学进展,1994(05):543. |
| [24] | Xujin;Wolfgang;Menesklou et al.ProcessingandpropertiesofBSTthinfilmsfortunablemicrowavedevices[J].Journal of the European Ceramic Society,2004,24:1735. |
| [25] | Zhai Jiwei;Yao Xi;Zhang Liangying;Shen Bo;Haydn Chen .Orientation control and dielectric properties of sol-gel deposited Ba (Ti, Zr)O_3 thin films[J].Journal of Crystal Growth,2003(1/4):341-347. |
| [26] | DixitA;Majumder S B;Savvinov A et al.Investigationsonthesol-gel-derivedbariumzirconiumtitanatethinfilms[J].Materials Letters,2002,56:933. |
| [27] | 胡志高,王根水,黄志明,孟祥建,石富文,褚君浩.Bi3.25La0.75Ti3O12超薄铁电薄膜的光学性质研究[J].红外与毫米波学报,2003(04):256-260. |
| [28] | ZhaiJiwei;Yao Xi;Zhang Liangying .Theopticalwaveguidecharacteristicsofhighlyorientatedsol-gelderivedpolycrystallineferroelectricPZTthinfilms[J].Ceramics International,2001,27:585. |
| [29] | Zhang WF.;Zhang MS.;Huang YB. .Optical properties of ferroelectric (Pb, La) (Zr, Ti) O-3 thin films grown by pulsed laser deposition[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2000(3/4):185-189. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%