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Visible photoluminescence (PL) has been observed from rare earth (Tm, Sm and Dy)-doped AlN films grown by radio-frequency magnetron reactive sputtering. X-ray diffraction indicates that the films are c-axis- oriented hexagonal wurtzite type structure with an average crystal size of about 80 - 110 nm. Room-temperature PL spectra indicate that the blue emission is due to the transition of D-1(2) to F-3(4) and (1)G(4) to H-3(6) intra 4f electron of Tm3+, the yellow emissions of AlN: Sm are due to (4)G(5/2) to the H-6(J) (J = 5/2, 7/2, 9/2, 11/2) and the reddish emissions of AlN:Dy correspond to the F-4(9/2) to H-6(J) (J = 15/2, 13/2, 11/2 and 9/2) and F-6(11/2) transitions.

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