探讨采用射频磁共溅射氮硅锆(ZrSiN)涂层作为扩散阻挡层(钛与瓷间的中间层),增强钛/瓷结合强度的可行性.结果表明:ZrSiN是含纳米结晶相ZrN和非晶相SiNx的纳米复合扩散阻挡层.无ZrSiN扩散阻挡层的钛经热循环后表面明显氧化,有ZrSiN扩散阻挡层处理后的钛表面经热循环后没有氧化钛,只有锆、硅、氮和氧元素,表明ZrSiN扩散阻挡层可有效阻挡钛在瓷烧结温度下氧化.三点弯曲试验表明ZrSiN涂层还可提高钛瓷结合强度.高硅含量的ZrSiN涂层处理的钛瓷结合强度更高,这与非晶相SiNx增多有关.
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