在CVD石墨烯的转移过程中无法避免会出现胶残留,导致了材料不必要的p型掺杂.研究表明,通常来自这种残余胶的p型掺杂影响了石墨烯的电学特性.本文发现NaOH溶液能够有效地去除这种PMMA(聚甲基丙烯酸甲酯(C5H8O2)x)中的含氧官能团,减少胶残留,并首次将其运用在CVD生长的石墨烯单层薄膜上.通过不同浓度NaOH溶液的选择,我们有效地解决了NaOH与SiO2/Si衬底反应的问题.处理结果显示,通过NaOH溶液浸泡石墨烯的载流子浓度变为原来的三分之一甚至更少,而且处理效果最明显的石墨烯样品的迁移率从880cm2/Vs升高到2260cm2/Vs.同时我们比较了水和NaOH处理效果的稳定性,结果显示用水处理的样品迁移率很快回到了处理前的数据,而用NaOH溶液处理的石墨烯薄膜迁移率最终稳定在原有迁移率的1.5倍.
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