阐述了目前常用的3大类基片材料,即塑料基、金属基和陶瓷基材料,比较了3类材料的性能,得出了陶瓷基材料是综合性能较好的基片材料的结论,并比较了目前陶瓷基片材料中的Al2O3、AlN、BeO、SiC的性能,认为SiC作为基片材料具有良好的发展前景；针对单相SiC陶瓷固有脆性导致难以大尺寸成型的问题,提出了使用C/SiC复合材料制备基片材料的可能性,并综述了C/SiC复合材料的制备工艺,比较了3种工艺(PIP、CVI、LSI)所制备的材料的性能,认为液相渗硅(LSI)C/SiC复合材料制备大尺寸封装基片材料是未来最具前景的发展方向.
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