以RuCl3·3H2O水溶液为电沉积液,采用直流-示差脉冲组合电沉积技术,通过后续热处理工艺制备超级电容器用钽基RuO2·nH2O薄膜电极材料.用X射线衍射仪 (XRD)、红外光谱仪 (FTIR)、差热分析仪 (DTA)、扫描电镜 (SEM)和电化学分析仪,研究前驱体RuCl3·cH2O转化为RuO2·nH2O的物相演变行为以及微观组织形貌和循环伏安性能.结果表明:随着热处理温度升高,前驱体RuCl3·cH2O通过4步反应转变成RuO2·nH2O薄膜;该薄膜经历从无定形向晶体结构的转变.经300 ℃热处理的RuO2·nH2O薄膜电极材料的单位面积质量为2.5 mg/cm2,比电容达到512 F/g;当电压扫描速率从5 mV/s增加到250 mV/s 时,其比电容下降34%.
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