结合当前掺杂ZnO功能薄膜的制备方法、工艺条件,综述了不同掺杂元素对ZnO薄膜的结构、电学、光学性能、气敏特性以及应用领域等方面的影响,并展望了ZnO功能薄膜的发展趋势.
参考文献
| [1] | Fujihara Shinobu;Sasaki Chikako;Kimura Toshio et al.[J].Journal of Applied Surface Science,2001,69(180):341. |
| [2] | Fujihara Shinobu;Sasaki Chikako;Toshio Kimura.[J].Journal of the European Ceramic Society,2001(21):2109. |
| [3] | Bougrine A.;El Hichou A.;Addou M.;Ebothe J.;Kachouane A.;Troyon M. .Structural, optical and cathodoluminescence characteristics of undoped and tin-doped ZnO thin films prepared by spray pyrolysis[J].Materials Chemistry and Physics,2003(2):438-445. |
| [4] | Kim K H;Park K C et al.[J].Thin Solid Films,1997,28-32(305):201. |
| [5] | Nunesa P;Fortunatoa E.[J].Journal of Vacuum Science and Technology,2002(64):281. |
| [6] | Yamamoto T et al.[J].Thin Solid Films,2004,182(451-452):439. |
| [7] | Ramakrishna Reddy K T;Reddy T B S et al.[J].Surface and Coatings Technology,2002,1424(151-152):110. |
| [8] | Benramdane N;Murad W A;Misho R H et al.[J].Journal of Materials Chemistry and Physics,1997,187-192(48):119. |
| [9] | 叶志镇,张银珠,徐伟中,吕建国.ZnO薄膜p型掺杂的研究进展[J].无机材料学报,2003(01):11-18. |
| [10] | Guo Xinli;Tabata Hitoshi;Kawai Tomoji .[J].Journal of Crystal Growth,2002,189-196(237-239):544. |
| [11] | Wang Jinzhong;Du Guotong;Zhao Baijun et al.[J].Journal of Crystal Growth,2003,1457(255):293. |
| [12] | Xu Weizhong;Ye Zhizhen;Zhou Ting et al.[J].Journal of Crystal Growth,2004,38(265):133. |
| [13] | Tuzemen S;Xiong G et al.[J].Journal of Physics B:Atomic Molecular and Optical Physics,2001,281(308):1197. |
| [14] | Sumiyaa M.[J].Journal of Applied Surface Science,2004(223):206. |
| [15] | 袁国栋,叶志镇,曾昱嘉,吕建国,钱庆,黄靖云,赵炳辉,朱丽萍.直流反应磁控溅射Al,N共掺方法生长p型ZnO薄膜及其特性[J].半导体学报,2004(06):668-673. |
| [16] | Huang Yanqiu;Liu Meidong;Li Zhen et al.[J].Journal of Marer Sci Eng B,2001,16(86):232. |
| [17] | 刘素琴,黄可龙,宋志方,彭斌.Sol-Gel法制备 ZnO压敏陶瓷及其电性[J].无机材料学报,2000(02):376-380. |
| [18] | Fu Engang;Zhuang Daming;Zhang Gong.[J].Journal of Microelectronics,2004(35):383. |
| [19] | Bhattacharya P et al.[J].Thin Solid Films,2004,407(447-448):564. |
| [20] | Ji Zhenguo et al.[J].Journal of Crystal Growth,2004,45(265):537. |
| [21] | Paul GK.;Bandyopadhyay S.;Sen SK.;Sen S. .Structural, optical and electrical studies on sol-gel deposited Zr doped ZnO films[J].Materials Chemistry and Physics,2003(1):71-75. |
| [22] | Prellier W;Fouchet A;Simon Ch.[J].Journal of Materials Science and Engineering B,2004(109):192. |
| [23] | 修向前,张荣,徐晓峰,俞慧强,陈丽星,施毅,郑有炓.溶胶-凝胶法制备ZnO基稀释磁性半导体薄膜[J].高技术通讯,2003(03):64-66. |
| [24] | Wakano T.;Morinaga Y.;Abe N.;Ashida A.;Ito T.;Fujimura N. .Magnetic and magneto-transport properties of ZnO : Ni films[J].Physica, E. Low-dimensional systems & nanostructures,2001(1/3):260-264. |
| [25] | Saeki Hiromasa;Tabata Hitoshi;Kawai Tomoji .[J].Journal of Solid State Communications,2001,10376(120):439. |
| [26] | Wagh MS.;Patil LA.;Seth T.;Amalnerkar DP. .Surface cupricated SnO2-ZnO thick films as a H2S gas sensor[J].Materials Chemistry and Physics,2004(2/3):228-233. |
| [27] | Paraguay F et al.[J].Thin Solid Films,2000,74(373):137. |
| [28] | 李健,白素杰,通拉嘎.稀土Nd掺杂纳米ZnO薄膜气敏特性[J].传感器技术,2004(05):9-11,14. |
| [29] | Tai Weon-Pil;Kim Jun-Gyu;Oh Jae-Hee .[J].Journal of Sensors and Actuators,2003,31-34(96):477. |
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