Pt/WO3纳米薄膜的氢敏特性

材料科学与工程学报, 2008, 26(5): 761-769.

Pt/WO3纳米薄膜的氢敏特性

范小花 ^1, , 唐一科 ^2, , 侯长军 ^3, , 范瑛 ^4,

1.重庆科技学院安全工程学院,重庆,401331

2.重庆大学机械传动国家重点实验室,重庆,400030

3.重庆大学化学化工学院/光电技术及系统教育部重点实验室,重庆,400030

4.中国工程物理研究院结构力学研究所,四川,绵阳,621000

基金项目: 重庆市自然科学基金(8418) 国家自然科学基金(10376045)

关键词： Pt/WO3纳米薄膜 , 氢敏特性 , 机理

Gas Sensitivity to H2 of Pt-WO3 Thin Film

用溶胶-凝胶法和磁控溅射法相结合制备了催化剂Pt掺杂的WO3纳米薄膜,通过改变氢气的体积分数、催化剂Pt的含量及热处理温度等实验因素,对Pt/WO3薄膜的氢致变色性能进行了测试;并利用X射线光电子能谱仪(XPS)分析了薄膜的氢敏机理.实验结果表明:先用溶胶-凝胶法制得WO3薄膜,然后再用磁控溅射法在该WO3薄膜上溅射掺杂5%的Pt,制得Pt/WO3双层纳米薄膜,经100℃热处理后,可以获得性能稳定且具有良好氢敏特性的优质薄膜;薄膜能检测的氢气浓度低至0.008%;XPS分析表明,W5+与W6+之间的转换是引起WO3薄膜氢致变色现象的主要原因.

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Pt/WO3纳米薄膜的氢敏特性

Gas Sensitivity to H2 of Pt-WO3 Thin Film

参考文献