用微等离子体氧化法在钛金属基体上制备钛酸锶钡(BST)陶瓷膜.讨论了Ba/Sr的摩尔比对陶瓷膜相组成的影响,并利用X射线衍射(XRD)、扫描电镜(SEM)和电子探针(EPMA)等测试手段对陶瓷膜的相组成、形貌特征和元素分布进行了分析.结果表明,在所选定的工艺参数条件下可得到钛酸锶钡陶瓷膜,膜层由接近于纯相的钛酸锶钡构成,表面相对较为平整,各元素在陶瓷膜层中分布均匀,无梯度变化.
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