基于复合靶制备Ti-DLC薄膜的研究

材料导报, 2008, 22(z1): 420-422.

1.西安工业大学陕西省薄膜技术与光电检测重点实验室,西安,710032

2.西安工业大学陕西省薄膜技术与光电检测重点实验室,西安,710032

3.西安工业大学陕西省薄膜技术与光电检测重点实验室,西安,710032

Study of Preparation of Ti-contained DLC Film Based on Composite Targets

利用非平衡磁控溅射技术溅射复合靶制备了一系列掺杂金属元素钛的类金刚石膜,并对薄膜的机械性能、沉积速率、电学性能及化学性能进行了测试,主要分析了影响机械性能、沉积速率的主要参数并确定了最佳工艺参数,同时阐述了其电学性能及化学性能结果.

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