本文用化学气相沉积法制备了ZnS薄膜和块材料；观察了ZnS在具有不同表面粗糙度的石墨和石英基体上的成核和长大行为；研究了沉积温度、H2S和Zn蒸汽流量对ZnS生长速率的影响规律．
The film and bulk material of zinc sulphide were prepared by chemical vapor deposition. The nucleation and the growth of zinc sulphide crystals deposited on the graphite and quartz substrates withdifferent roughness were observed. The grAlNs of zinc sulphide deposited on the substrate surface are veryfine, with equiaoxial shape, and then grow up into columnar shape. The roughness of the substrate surfaceinfluences the nucleation density of zinc sulphide but has no effect on the growth rate of zinc sulphide increases with increasing the flow of H2S and vapoured Zn. The growth rate exhibits maxium value at a given deposition temperature.
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