Zr-Si-N扩散阻挡层及其热稳定性的研究

1.西安交通大学金属材料强度国家重点实验室,陕西,西安,710049

2.山东省临沂市兰山区金雀山办事处,山东,临沂,276000

3.西安交通大学金属材料强度国家重点实验室,陕西,西安,710049

4.西安交通大学金属材料强度国家重点实验室,陕西,西安,710049

基金项目: 教育部高校骨干教师资助计划国家高技术研究发展计划(863计划)(59931010)

The Study of Zr-Si-N Diffusion Barrier and Its Thermal Stability

用反应磁控溅射法在不同偏压下沉积了Zr-Si-N扩散阻挡层,结果表明:Zr-Si-N膜的Si含量、电阻率随偏压的升高而降低;Zr-Si-N膜的晶体相随溅射偏压的升高而增加;Zr-Si-N扩散阻挡层的热稳定性高,在850℃时仍能有效阻挡Cu的扩散.

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