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GaN材料以其优良的光电性质,已成为制造发光器件和高温大功率器件的最有前途的材料.欧姆接触是制备GaN基器件的关键技术之一.着重论述了在n-GaN和p-GaN上制备欧姆接触的研究现状.

参考文献

[1] Nakamura S;Senoh M;Nagaham S et al.[J].Applied Physics Letters,1996,35:L74.
[2] Nakamura S;Senoh M;Nagaham S et al.[J].Applied Physics Letters,1998(37):L1020.
[3] Khan M A .[J].Applied Physics Letters,1993,62:1786.
[4] Pearton S J;Zolper J C;Shul R J et al.[J].Journal of Applied Physics,1999,86(01):1.
[5] Foresi J S;Moustakas T D .[J].Applied Physics Letters,1999,62:2859.
[6] Wu Y F;Jiang W N;Keller B P et al.[J].Solid-State Electronics,1997,41:165.
[7] Ruvimov S;Liliental Weber Z;Washburn J et al.[J].Applied Physics Letters,1996,69(11):1556.
[8] GASSER S.M.;KOLAWA E.;NICOLET M.-A. .Reaction of Aluminum-on-Titanium Bilayer with GaN: Influence of the Al:Ti Atomic Ratio[J].Journal of Electronic Materials,1999(8):949-954.
[9] Luther B P;Mohney S E;Jackson T N et al.[J].Materials Research Society Symposium Proceedings,1997,449:1097.
[10] Lin M E;Huang F Y;Morkoc H .[J].Applied Physics Letters,1994,64(19):2557.
[11] Yoo M C;Lee J W;Myoung J M et al.[J].Materials Research Society Symposium Proceedings,1996,423:131.
[12] King D J;Zhang L;Ramer J C et al.[J].Materials Research Society Symposium Proceedings,1997,468:421.
[13] Youn DH.;Sato H.;Sugahara T.;Naoi Y.;Sakai S.;Hao MS. .Ohmic contact to p-type GaN[J].Japanese journal of applied physics,1998(4A):1768-1771.
[14] Ishikawa H.;Koide Y.;Yamasaki S.;Nagai S.;Umezaki J. Koike M.;Murakami M.;Kobayashi S. .EFFECTS OF SURFACE TREATMENTS AND METAL WORK FUNCTIONS ON ELECTRICAL PROPERTIES AT P-GAN/METAL INTERFACES[J].Journal of Applied Physics,1997(3):1315-1322.
[15] Kaminska E;Piotrowska A;Barcz A et al.[J].Acta Physica Polonica A,1997,92(04):819.
[16] Materials Research Society Conference:Boston MA USA:2-6 Dec 1996 PittsburghPA[S].USA:Materials Research Society,1997.
[17] Kim T;Khim J;Chae S et al.[J].Materials Research Society Symposium Proceedings,1997,468:427.
[18] Trexler J Y;Pearton S J;Holloway P H et al.[J].Materials Research Society Symposium Proceedings,1997,449:1091.
[19] Cao XA.;Ren F.;Lothian JR.;Pearton SJ. .Thermal stability of W and WSix contacts on p-GaN[J].Applied physics letters,1998(7):942-944.
[20] Suparna Pal;Takashi Sugino .[J].Applied Surface Science,2000,161:263.
[21] Jin-Kuo Ho;Charng-Shyang Jong;Chien C. Chiu;Chao-Nien Huang;Chin-Yuen Chen;Kwang Kuo Shih .Low-resistance ohmic contacts to p-type GaN[J].Applied physics letters,1999(9):1275-1277.
[22] Arai T;Sueyeshi H;Yasuo Koide et al.[J].Journal of Applied Physics,2001,89(05)
[23] Zhou L;Lanford W;Ping A T et al.[J].Applied Physics Letters,2000,76(23):3451.
[24] Kim D W;Sung Y J;Park J W et al.[J].THIN SOLID FILMS,2001,87:398.
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