利用负衬底偏压和发射电子增强核化的方法,通过微波等离子体和热灯丝CVD法在Si(1∞)上合成出了高度定向的异质外延金刚石膜.并利用冷离子注入和快速退火处理技术完成P型掺杂异质外延金刚石膜的制作,研制出高灵敏度的压阻和磁阻传感器件.试验结果表明,这些器件不仅具有高灵敏度,而且在高温、高辐射和强化学腐蚀的环境下仍能正常工作.
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