采用先注入1×1017 ion/cm2 Ag离子,注入能量为64.2 keV;后注入1.5×1017 ion/cm2 Ta离子,注入能量为146.5 keV对Ti6Al4V合金进行离子双注入表面改性.采用X射线衍射分析离子双注入前后Ti6Al4V合金表面的物相；利用X射线光电子能谱研究离子双注入前后Ti6Al4V合金表面元素化合态以及离子双注入Ti6Al4V合金表面元素浓度沿深度方向的分布.结果表明,离子双注入前后Ti6Al4V合金表面都被氧化了,离子注入前合金表面存在TiO、Ti2O3和Al2O3,离子双注入后Ti6Al4V合金表面有TiO2、Ta2O5、TaOx和AgO2新相生成,且在表面还存在少量V2O5和Al2O3.离子双注入合金表面生成的氧化物层形成了扩散阻挡层,阻挡铝离子和钒离子向外扩散,从而减少Ti6Al4V合金表面铝离子和钒离子的释放量.
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