利用热重分析(TG)对化学溶液法前驱体混合物的热分解过程进行研究,确定了预分解温度;利用X射线衍射(XRD)和原子力显微镜(AFM)对金属有机沉积法(MOD)合成的La2CuMnO6薄膜的相组成和形貌结构进行了表征.结果表明,选择合适的前驱体La(CH3COO)3·1.5H2O、Cu(CH3COO)2·1.0H2O、Mn(CH3COO)2·4.0H2O,在1000℃、保温时间3h、SrTiO3(STO)(100)、Ar-4％ H2气氛及总离子浓度1.0mol/L的工艺条件下制备的La2CuMnO6薄膜具有很好的c轴织构,薄膜表面较平整、均匀、无裂纹、无孔洞,分布均匀且排列致密,完全满足缓冲层对薄膜的要求.
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