采用磁控溅射的方法在以SrRuO3 (SRO)为底电极的(001)取向的SrTiO3基片上制备了外延BiFeO3 (BFO)薄膜,并以氧化铟锡(ITO)和金属Pt为上电极构架了ITO/BFO/SRO和Pt/BFO/SRO两种薄膜电容器,研究上电极对外延BFO薄膜铁电性和反转特性的影响.结果表明,两种薄膜电容器均体现了良好的饱和电滞回线,当测试电场为333 kV/cm时,ITO/BFO/SRO和Pt/BFO/SRO两种电容器的剩余极化强度分别为47.6 μC/cm2和56 μC/cm2,矫顽场分别为223 kV/cm和200 kV/cm.此外,两种薄膜电容器都具有良好的保持和抗疲劳特性.通过反转和非反转电流对时间的积分,可以计算出真实的极化强度.当反转电压幅值为17 V时,ITO/BFO/SRO和Pt/BFO/SRO两种电容器电流的反转时间分别为0.48 μs和0.32μs,真实极化强度的计算值约为41μC/cm2和47 μC/cm2,此计算值和铁电净极化强度的测量值符合的很好.
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