采用真空阴极电弧制备了TiAlN涂层,研究了N2气压和基体负偏压对涂层硬度的影响规律,分析了涂层的致硬机理,探讨了硬度对摩擦学性能的影响.结果表明,N2降低入射离子能量,降低增原子扩散,导致晶粒细化；基体负偏压增大入射离子能量,导致涂层致密化并依次出现(200)、(111)、(220)、(200)择优取向.TiAlN涂层的硬度受Ti、Al、N原子间键能,生长面择优取向及晶粒显微组织的影响.其中最薄弱因素起决定作用.摩擦学性能研究表明,高硬度TiAlN涂层易形成磨粒磨损,摩擦系数和磨损率高；低硬度TiAlN涂层易发生粘着磨损,摩擦系数和磨损率低.
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