采用磁控溅射和溶胶-凝胶两种方法在石英基体上制备了纯TiO2薄膜,并通过离子注入及溶胶掺杂方法分别对TiO2薄膜进行Ge掺杂改性.利用XRD、XPS及UV-Vis对两种TiO2复合薄膜的晶相结构、原子化学态以及光吸收性能进行了表征.结果表明,磁控溅射法制得TiO2薄膜为锐钛矿相,Ge离子注入引起复合薄膜的锐钛矿相消失,且该相600℃退火后并未得到恢复;经过退火后Ge在磁控溅射TiO2薄膜中以Ge单质存在.溶胶-凝胶法Ge掺杂复合薄膜中存在锐钛矿相TiO2和Ge晶相,Ge在薄膜表面以Ge和GeO2形式存在.两种掺杂方法制得的复合薄膜紫外-可见光吸收边均发生了红移.
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