用电子探针波谱仪对镍基单晶高温合金进行了定量分析检测，对测试过程中检测线的选择及谱线干扰等方面的问题进行了讨论和研究，提出了解决这些问题应遵循的原则和方法，对组分复杂样品的电子探针定量分析提供有用的参考和借鉴。
The quantitative analysis of Ni-based single crystal superalloys is carried out by electron probe microanalyzer(EPMA) wavelength dispersive spectroscopy in this paper．The problems of how to choose the proper analysis line and how to avoid the effect of spectrum interference are discussed and researched．The principles and methods for resolving these problems are proposed，which can provide the valuable guidelines for treating EPMA quantitative analysis of samples with complex components．
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