采用磁控溅射法在单层玻璃基片上制备了由多层薄膜构成的电致变色元件,通过XRD、SEM等对薄膜及元件的晶体结构、表面形貌等进行了表征分析.采用可见光透射谱,研究了元件的电致变色性能.结果表明,较低的基片温度和较大的靶基距是采用磁控溅射制备电致变色元件的两个很重要的因素.所制备的全薄膜电致变色元件在处于漂白态和着色态时,对可见光的透过率分别达到了47.19%和15.67%,对光的透射率调节范围为31.52%.该全薄膜电致变色元件在电致变色智能窗领域具有较大的应用潜力.
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