采用非平衡分子动力学方法(NEMD)研究了平均温度为500 K、厚度为2～32 nm的单晶硅薄膜的法向热导率.模拟结果表明,薄膜热导率显著低于对应温度下的体硅单晶的实验值,并随膜厚度减小以接近线性的规律减小.用声子气动力论模型的分析结果与NEMD模拟相一致,表明纳米单晶硅薄膜中声子平均自由程显著减小.
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