各种铁磁性金属、非铁磁性金属组成的磁性多层膜系统的性质及微结构的研究是凝聚态物理及材料科学中的一个热点。它们的巨磁电阻（GMR）效应强烈地依赖于多层膜的微结构，如周期厚度、界面粗糙度、生长取向以及晶粒度等。采用掠入射X射线衍射分析（ＧIXA）法表征多层膜的微结构，具有无损和空间分辨率高的特点。通过ＧIXA可获得有关薄膜的密度、厚度以及表面粗糙度等微观结构信息。文章对上述有关的分析方法进行了评述。
It is well known that the physical properities of multilayers(for example magnetic metal ultthin film) prepared by PVD are closely related to their interfacial structure.Therefore it is essential to characterize the microstructural parameter inside the multilayer such as the roughness, sublayer thickness, atomic density and interdiffusion etc. Among the variety of experimental techniques, Xray diffraction is one of widely used to characterize the microstructure of multilayer system .Low angle Xray diffraction profiles can provide detail information about the multilayer periodicity and thickness of the individual layers that make up a multilayer with nondestructive and higher space resolution. In this paper, the structural characterezation and analytical techniques of multilayered structures will be presented.
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