本文利用Er和硅离子共注入热氧化SiO2薄膜的方法制备出Er离子掺杂的含纳米硅微晶的SiO2发光薄膜,在此基础上制备出ITO/SiON/Si-rich SiO2:Er/Si MOS结构电致发光器件,比较研究了硅微晶密度的变化对于MOS结构的电致发光和光致发光特性的影响.随着纳米硅微晶的增多,Er离子在1.54μm处的红外光致发光显著增强,显示出纳米硅微晶对Er离子光致发光的敏化作用.相反,对于电致发光来说,增加纳米硅微晶数量的同时也增加了SiO2薄膜中的电子俘获陷阱,电子在纳米硅微晶之间的隧穿降低了过热电子的数量和平均能量,因而降低了碰撞激发Er离子产生的电致发光效率.
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