不同厚度的Nd0.7Sr0.3MnO3(NSMO)外延膜是由脉冲激光沉积生长在(LaAlO3)0.3(Sr2AlTaO6)0.7(LSAT)(001)衬底上的.X射线衍射(XRD)和电阻率测量结果显示,沉积氧压为21.333Pa时薄膜c轴参数随着膜厚的减小而增加,同时金属-绝缘体的转变温度TP下降,电阻率增大；另一组生长在27.999Pa氧压下,厚度为120nm的薄膜单胞体积随着退火温度的升高而增大,同时电阻率升高,TP下降.上述结果归因于低的原位沉积氧压和真空退火引起的氧缺失导致n(Mn3+)/n(M甜+)的增大以及MnO6八面体的畸变.结果表明,对超薄的应变薄膜,要获得较高的TP值,较高的沉积氧压是必需的,同时应仔细考虑真空退火对薄膜性能的影响.
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