能否成功制备自支撑薄膜不仅制约着激光和核物理研究的发展,而且限制了原子核化学试验的开展.自支撑薄膜的制备方法与普通薄膜的制备方法有很大的区别,经过近50年的发展,已经形成了一系列独特的制备方案.在成膜方面,其研究热点集中在如何降低薄膜内应力和提高材料的利用率上;同时各种可溶性衬底和脱膜剂对自支撑膜的质量有很大的影响,需要根据膜材料进行选择.总结了常见的衬底和脱膜剂及其特点,并介绍了常用的脱膜方法--漂浮法.指出自支撑薄膜制备所面临的问题主要是进一步降低膜的粗糙度,制备低应力的自支撑多层膜.
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