根据唯像理论研究了化学气相沉积自支撑金刚石薄膜中织构和弹性性能之间的关系,揭示了晶体取向和织构对残余应变和残余应力的影响.织构使CVD金刚石薄膜杨氏模量和宏观残余应变呈现各向异性,而且两者呈现相反的分布规律.织构和杂质都能影响金刚石薄膜的弹性模量和残余应变,但是织构的影响是主要的.实验中测量的残余应变很好的符合了根据薄膜织构计算得到的弹性模量值.因此可以借助改变薄膜织构来调节薄膜的残余应力.
The relationship between texture and elastic properties of CVD diamond films was analyzed based on the phenomenological theory, which indicates the effect of crystalline orientation and texture on the residual strain and residual stress. The Young's modulus and residual strains in CVD diamond films are anisotropic and their distribution rules are opposite because of texture. Both texture and impurities can influence the Young's modulus and residual strains in CVD diamond films, in which texture plays a main role. The experimental value of the residual strains are in good agreement with the correspondingly calculated Young's modulus in connection with the fiber textures in the films. It is believed that the residual stress can be adjusted by adjusting texture of diamond films.
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