以三氯化钌和2,2,6,6-四甲基-3,5-庚二酮为原料，在甲醇中合成了β-二酮前驱体-三(2,2,6,6-四甲基-3,5-庚二酮)酸钌(III)。通过元素分析、红外光谱、核磁共振谱、紫外-可见光谱等对其进行了表征，确定了配合物的结构组成。采用 TG-DTA 分析了配合物在空气和氮气中的热分解行为，为MOCVD 镀钌和钌的氧化物薄膜工艺提供热力学数据与参考。
A precursor, tris(2,2,6,6-tetramethyl-3,5-heptanedionato ) ruthenium (Ru(thd)3) was synthesized from RuCl3 and Hthd in methanol. The structure of Ru(thd)3 was characterized by element analysis, infrared spectroscopy, NMR spectroscopy and UV-vis spectrum. The thermal decomposition behavior was studied by TG-DTA analysis under air and nitrogen. The results provided the thermodynamic data and reference for preparing ruthenium and ruthenium oxide thin film by MOCVD from Ru(thd)3.
参考文献
| [1] | Hierso J C;Serp P;Feurer R et al.MOCVD of rhodium,palladium and platinum complexes on fluidized divided substrates:Novel process for one-step preparation of noble-metal catalysts[J].Applide Organometallic Chemistry,1998,12(01):161-163. |
| [2] | Hierso J C;Feurer R;Kalck P .Platinum,palladium and rhodium complexes as volatile precursors for depositing materials[J].COORDINATION CHEMISTRY REVIEWS,1998,178(23):1811-1834. |
| [3] | 文尚胜,廖常俊,范广涵,刘颂豪.现代MOCVD技术的发展与展望[J].华南师范大学学报(自然科学版),1999(03):99. |
| [4] | 阎鑫,张秋禹,卢锦花,赵雯,张军平,范晓东.铱金属及其氧化物薄膜的制备与应用研究进展[J].稀有金属,2004(04):756-761. |
| [5] | 胡昌义,戴姣燕,陈松,欧阳远良,王云.贵金属化学气相沉积的研究进展[J].贵金属,2005(02):57-63. |
| [6] | Platinum OMCVD processes and precursor chemistry[J].Coordination chemistry reviews,2008(1/2):155-169. |
| [7] | Gozum J E;Pollina D M;Jensen J A et al."Tailored" organometallics as precursors for the chemical vapor deposition of high-purity palladium and platinum thin films[J].Journal of the American Chemical Society,1988,110(33):2688-2689. |
| [8] | Bousman KS;Toscano PJ;Welch JT .The effect of sulfur on CVD performance of Pd(II) beta-diketonate precursors and the completion of a structural trans-influence series: synthesis and structural characterization of Pd(S,S-tmhd)(2)[J].Inorganica Chimica Acta,2004(13):3871-3876. |
| [9] | Mclellan W R;Hoehn H H;Cripps H N .π-Allyl derivatives of transition metals[J].Journal of the American Chemical Society,1961,83(15):1601-1607. |
| [10] | Lashdaf M;Hatanpaa T;Tiitta M .Volatileβ-diketonato complexes of ruthenium,palladium and platinum.Prepa-ration and thermal characterization[J].Journal of Thermal Analysis and Calorimetry,2001,64(03):1171-1182. |
| [11] | Nitin S.Nandurkar;Mayur J.Bhanushali;Malhari D.Bhor .Palladium bis(2,2,6,6-tetramethyl-3,5-heptanedionate):an efficient catalyst for regioselective C-2 arylation of heterocycles[J].Tetrahedron letters: The International Journal for the Rapid Publication of Preliminary Communications in Organic Chemistry,2008(6):1045-1048. |
| [12] | Henc B;Jolly P W;Salz R et al.Transition metal allyls:III.The(η3-allyl)2M complexes of nickel,palladium and platinum:structural considerations[J].Journal of Organo-metallic Chemistry,1980,191(02):425-448. |
| [13] | Dossi C.;Sordelli L.;Bellatreccia M.;Zanoni R.;Psaro R. .CHEMICAL VAPOR DEPOSITION OF PLATINUM HEXAFLUOROACETYLACETONATE INSIDE HL ZEOLITE - ROLE OF METAL-PROTON INTERACTIONS[J].Journal of Catalysis,1996(2):435-440. |
| [14] | Morozova N B;Zherikova K V;Semyannikov P P et al.Study of temperature dependencies of saturated vapor pressure of ruthenium(III)beta-diketonateterivatives[J].Journal of Thermanal Calorim,2009,98:395-399. |
| [15] | Koiwa T;Masuda Y;Shono J et al.Synthesis,chara-cterization,and detailed electrochemistry of binuclear ruthenium,(III)complexes bridged by bisacetyl-acetonate.crystal and molecular structures of [{Ru,(acac)2}2,(tae)],(acac=2,4-Pentanedionate Ion,tae=1,1,2,2-tetra-acetylethanate dianion)[J].Inorganic Chemistry,2004,43(20):6215-6223. |
| [16] | Abrams M J;Fricker S P;Murrer B A et al.Pharma-ceutical compositions comprising metal complexes[P].US,5,824,673,1998-10-20. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%