采用电子束熔炼方法提纯了冶金级硅材料.实验结果表明随熔炼时间延长,硅中挥发性杂质元素P、Al、Ca的含量逐渐降低.熔炼40min后,硅中P含量可以降至2.2×10-5%(质量分数);Al、Ca的最低含量为8.5×10-5%和1.5×10-4%(质量分数).P、Al、Ca的挥发去除为一阶反应过程,反应速率常数分别为0.11、0.12和0.13min-1.
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