射频等离子体辅助化学气相沉积Ti-B-N薄膜的结构与性能

中国有色金属学报, 2004, 14(12): 1985-1989.

射频等离子体辅助化学气相沉积Ti-B-N薄膜的结构与性能

马胜利 ^1, , 马青松 ^2, , 牛新平 ^3, , 徐可为 ^4, , ^5, , ^6,

1.西安交通大学,金属材料强度国家重点实验室,西安,710049

2.西安交通大学,金属材料强度国家重点实验室,西安,710049

3.西安交通大学,金属材料强度国家重点实验室,西安,710049

4.西安交通大学,金属材料强度国家重点实验室,西安,710049

5.慕尼黑工业大学,无机材料化学研究所,慕尼黑,D-85747

6.慕尼黑工业大学,无机材料化学研究所,慕尼黑,D-85747

基金项目: 国家自然科学基金(GRD2001-40419) 欧盟第五框架研究开发基金(GRD2001-40419) 国家自然科学基金(50271053,50371067)

关键词：射频等离子体辅助化学气相沿积 , Ti-B-N薄膜 , 硬度 , 耐磨性

Structure and properties of Ti-B-N coatings prepared by radio-frequency plasma-enhanced chemical vapor depostion

研究了射频等离子体辅助化学气相沉积获得的Ti-B-N薄膜的微观组织结构和力学性能.结果表明:B的加入使Ti-B-N薄膜中出现TiN纳米晶、BN非晶和TiB2非晶(nc-TiN/a-BN/a-TiB2)的复相结构.Ti-B-N薄膜组织致密,晶粒细小,薄膜硬度显著提高.用球盘式磨损实验考察了薄膜的摩擦学特性.与TiN相比,Ti-B-N薄膜抗磨损性能有显著提高,磨损机制为微观切削与疲劳磨损共同作用,但摩擦系数较TiN稍高.

参考文献

[1]	M. S. Wong;Y. C. Lee .Deposition and characterization of Ti-B-N monolithic and multilayer coatings[J].Surface & Coatings Technology,1999(0):194-199.
[2]	Pierson JF.;Chapusot V.;Billard A.;Alnot M.;Bauer P. .Characterisation of reactively sputtered Ti-B-N and Ti-B-O coatings[J].Surface & Coatings Technology,2002(0):526-530.
[3]	Mollart T P;Haupt J;Gilmore R et al.Tribological behavior of homogeneous Ti-B-N, Ti-B-N-C and TiN/h-BN/TiB3 multilayer coatings[J].Surface and Coatings Technology,1996,86-87(12):231-236.
[4]	Mitterer C. -;Beschliesser M;Losbichler P;Warbichler P;Hofer F;Gibson PN;Gissler W;Hruby H;Musil J;Vlcek J;Mayrhofer PH .Micro structure and properties of nanocomposite Ti-B-N and Ti-B-C coatings[J].Surface & Coatings Technology,1999(0):405-411.
[5]	Hammer P;Steiner A;Villa R et al.Titanium born nitride coatings of very high hardness[J].Surface and Coatings Technology,1994,68-69(12):194-198.
[6]	Pierson JF.;Bauer JP.;Jolly J.;Bertran F. .Structural and electrical properties of sputtered titanium boronitride films[J].Surface & Coatings Technology,2001(0):906-910.
[7]	Maya L;Vallet C E;Fiedor J N .Reactive sputtering of titanium diboride or titanium disilicide[J].Journal of Vacuum Science and Technology A-Vacuum Surfaces and Films,1997,15(04):2007-2012.
[8]	C. Heau;J. P. Terrat .Ultrahard Ti-B-N coatings obtained by reactive magnetron sputtering of a Ti-B target[J].Surface & Coatings Technology,1998(1/3):332-339.
[9]	Karvankova P.;Veprek-Heijman MGJ.;Zindulka O.;Bergmaier A.;Veprek S. .Superhard nc-TiN/a-BN and nc-TiN/a-TiBx/a-BN coatings prepared by plasma CVD and PVD: a comparative study of their properties[J].Surface & Coatings Technology,2003(0):149-156.
[10]	Karvankova P .Superhard nc-TiN/a-BN/a-TiB2 and nc-MnN/a-metal Nanocrystalline Composite Coatings[D].Munich: Technical University Munich,2003.
[11]	马大衍,王昕,马胜利,徐可为.Ti-Si-N纳米复相薄膜及Si含量对脉冲直流PCVD镀膜质量的影响[J].金属学报,2003(10):1047-1050.
[12]	Niederhofer A;Nesladek P;Veprek S .Structural properties, internal stress and thermal stability of ncTiN/a-Si3 N4, nc-TiN/TiSix and nc-(Ti1-y Aly Six ) N superhard nanocomposite coatings reaching the hardness of diamond[J].Surface and Coatings Technology,1999,120-121(11):173-178.
[13]	Patscheider J;Zehnder T;Diserens M .Structureperformance relation in nanocomposite coatings[J].Surface and Coatings Technology,2001,146-147(9-10):201-208.
[14]	戴雄杰.摩擦学基础[M].上海:上海科学技术出版社,1984:5-40.
[15]	黄鹤 .离子束辅助沉积类石墨碳膜和B<,x>O膜的结构及其摩擦学性能的研究[D].西安交通大学,2003.

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