拥有众多优良性能的SrTiO3薄膜已经受到了人们的广泛关注.本文首先对SrTiO3薄膜的性质和应用进行了简单介绍,然后从物理和化学两大类方法着重对其现有制备技术及研究进展进行了全面的综述,文章最后对SrTiO3薄膜的制备及器件研究领域进行了展望.
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