以TiCl4-BCl3-H2为反应体系,采用化学气相沉积技术,在低碳钢和石墨表面成功沉积了TiB2涂层,并研究了沉积温度、气体流量和基体类型对涂层显微结构和显微硬度的影响.结果表明:沉积温度较高时,低碳钢表面的TiB2涂层晶粒取向随机,结晶度较好,沉积温度较低时则呈柱状晶,晶粒取向随机时的显微硬度高于呈柱状晶时的显微硬度；基体类型对涂层沉积速率的影响显著,在980℃,BCl3流量100 mL/min的条件下沉积1h,低碳钢表面的涂层厚度为20μm,而石墨表面的涂层厚度为44～ 70 μm.
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