在不通入活性气体的条件下,采用三乙酰丙酮铱金属有机物化学气相沉积方法制备铱薄膜.结果表明:低于190℃长时间加热使先驱体分子结构改变,其C-H和C-O键断裂活性升高,导致沉积薄膜中含有显著数量的碳杂质;高于220℃加热先驱体和550℃沉积,可获得致密连续、无杂质碳并且呈亮银白色的铱薄膜.
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