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利用丝网印刷工艺在印有金电极的陶瓷基片上负载WO3多孔厚膜,再在500℃、600℃、700℃、800℃下烧结制成气敏器件,测试了其在甲苯中的伏安曲线和气敏响应特性.由SEM统计分析了4种厚膜的烧结颈信息,并通过导电模型结合Ⅰ-Ⅴ曲线拟合得到耗尽层宽度.依据烧结颈宽度和2倍耗尽层宽度的差值将烧结颈分成3类:宽颈、窄颈和闭颈,比较了三者对灵敏度的贡献.实验结果表明,不同类型的烧结颈含量直接影响材料的灵敏度,烧结颈含量越高的材料,其灵敏度越高.其中,有开关效应的窄颈对材料灵敏度贡献最大.

参考文献

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