SrRuO3导电层对快速退火制备Pb(Zr,Ti)O3薄膜结构和性能的影响

人工晶体学报, 2010, 39(3): 608-627.

SrRuO3导电层对快速退火制备Pb(Zr,Ti)O3薄膜结构和性能的影响

王宽冒 ^1, , 刘保亭 ^2, , 倪志宏 ^3, , 赵敬伟 ^4, , 李丽 ^5, , 李曼 ^6, , 周阳 ^7,

1.河北大学物理科学与技术学院,保定,071002

2.河北大学物理科学与技术学院,保定,071002

3.河北大学计算中心,保定,071002

4.河北大学物理科学与技术学院,保定,071002

5.河北大学物理科学与技术学院,保定,071002

6.河北大学物理科学与技术学院,保定,071002

7.河北大学物理科学与技术学院,保定,071002

基金项目: 教育部科学技术研究重点项目(207013) 河北省自然科学基金项目(E2008000620) 国家自然科学基金(60876055) 河北省应用基础研究计划重点基础研究项目(08965124D)

关键词：钌酸锶 , 锆钛酸铅 , 快速退火

Effect of SrRuO3 Conductive Layer on the Structure and Properties of Pb(Zr,Ti)O3 Thin Films Prepared by Rapid Thermal Annealing

采用溶胶-凝胶法在Pt/Ti/SiO2/Si基片上,制备了Pt/Pb(Zr,Ti)O3(PZT)/Pt和SrRuO3(SRO)/PZT/SrRuO3(SRO)异质结电容器,并研究了快速退火条件下SRO导电层对PZT结构和性能的影响.XRD测试表明,两种结构电容器中的PZT薄膜均为钙钛矿结构,SRO/PZT/SRO、Pt/PZT/Pt均具有较好的铁电性和脉宽依赖性,5 V电压下两电容器的剩余极化强度Pr和矫顽电压Vc分别为28.3 μC/cm2、1.2 V和17.4 μC/cm2、2.1 V.在经过1010次翻转后,SRO/PZT/SRO铁电电容器疲劳特性相对于Pt/PZT/Pt电容器有了较大的改善,但SRO导电层的引入也带来了漏电流增大的问题.

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