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  4. 物理气相沉积TiAlN涂层的研究进展

材料导报, 2011, 25(11): 25-29.

物理气相沉积TiAlN涂层的研究进展

曹华伟 1, , 张程煜 2, , 乔生儒 3, , 曹晓雨 4,

1.西北工业大学超高温结构复合材料国防科技重点实验室,西安710072

2.西北工业大学超高温结构复合材料国防科技重点实验室,西安710072

3.西北工业大学超高温结构复合材料国防科技重点实验室,西安710072

4.西北工业大学超高温结构复合材料国防科技重点实验室,西安710072

基金项目:   国家自然科学基金面上项目(50702045)   新世纪优秀人才支持计划(NCET-08-0460)   高等学校博士学科点专项科研基金(20070699007)  

关键词： TiAlN涂层 , 制备方法 , 晶体结构 , 硬度 , 高温抗氧化性

Recent Progresses in Physical Vapor Deposited TiAIN Coating

概述了物理气相沉积TiAlN涂层的研究现状及发展趋势,详细分析了制备方法、Al含量、N2流量、基体偏压、温度以及其他元素对TiAlN涂层的涂层结构、硬度、高温抗氧化性和耐腐蚀性等性能的影响.目前制备的TiAlN涂层存在残余应力较大、表面液滴数量较多和涂层致密度差等问题.为进一步促进TiAlN涂层的应用,今后还需探索该涂层的制备方法,优化其制备工艺.多元纳米复合涂层和超点阵多层涂层是两个具有潜力的发展方向.

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