材料期刊网

A new EPR defect (labeled Si-PK5) and two previously known defects (Si-S1 and Si-S2) are observed in proton-implanted N-type FZ-lilicon. Our results indicate that Si-PK5 has trigonal symmetry with the <111> direction as its symmetry axis. Its paramagnetic parameters are S = 1/2, g(parallel-to) = 2.0078 and g(perpendicular-to) = 2.0174. According to the empirical methods of classifying defects given by Lee and Corbett and by Sieverts. Si-Pk5 presumably has the structure of bond-centered interstitial. As for Si-S2, the hyperfine splitting of one equivalent Si-29 has been observed for the first time.