We present a new process to get in-situ-growth carbon nanotubes (CNTs) array device with good FE properties by CO(2)-assisted thermal chemical vapor deposition (CVD). Field Emission measurement shows that introducing CO(2) into CNTs growth system leads to a significant enhancement in the emission properties, both the turn-on field and threshold field decrease. Raman, SEM and TEM investigation results showed that in this CO(2)-assisted thermal CVD, CO(2) can remove amorphous carbon during CNTs growth process, and at the same time, it also creates more defects on the CNTs wall. Both can enhance FE properties of the CNTs at suitable CO(2) concentrations.
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