采用磁控溅射法在Si(100)和石英衬底上沉积Y2Mo3O12,并经退火处理获得正交相Y2Mo3O12薄膜.采用扫描电镜、X射线衍射仪、变温拉曼光谱仪和紫外-可见光谱计研究了薄膜的表面形貌、结晶特性、吸湿性和光吸收性能.结果表明,磁控溅射沉积Y2Mo3O12薄膜为非晶态,退火后结晶为正交相结构.正交相Y2Mo3O12薄膜表面平整、晶粒细小,具有可逆的脱水吸水性能,其光学带隙宽度为4.58eV,对近紫外光(波长286～270nm)具有很好的吸收性能,可应用于日盲探测器中.
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