半导体陶瓷型薄膜气敏传感器,具有灵敏度高、与气体反应快、制备成本较低等优点,已经成为近年传感器研究和开发的重点,是未来气敏传感器的发展方向之一.本文介绍了陶瓷型半导体薄膜气敏传感器常见的器件结构、薄膜材料的主要制备方法,部分主要的半导体金属氧化物薄膜气敏材料,以及近期相关的研究进展,并扼要分析了今后的发展方向.
参考文献
| [1] | Seiyama T;Kato A;Fujiishi K et al.[J].Analytical Chemistry,1962,34:1502-1503. |
| [2] | Frank J;Fleischer M;Meixner H et al.[J].Sensors and Actuators,1998,B49:110-114. |
| [3] | Varghese O K;Malhotra L K;Sharma G L .[J].Sensors and Actuators,1999,B55:161-165. |
| [4] | Bender F;Kim C;Misna T et al.[J].Sensors and Actuators,2001,B77:281-286. |
| [5] | Korotcenkov G;Brinnzari V;Schwank J et al.[J].Sensors and Actuators,2001,B77:244-252. |
| [6] | Chung W Y;Lim J W;Lee D D et al.[J].Sensors and Actuators,2000,B64:118-123. |
| [7] | Kim C K;Choi S M;Noh I H et al.[J].Sensors and Actuators,2001,B77:463-467. |
| [8] | Lee D S;Lim J W;Lee S M et al.[J].Sensors and Actuators,2000,B64:31-36. |
| [9] | Bittencourt C;Landers R;Llobet E et al.[J].Journal of the Electrochemical Society,2002,149:81-86. |
| [10] | Teeramongkonrasmee A;Sriyudthsak M .[J].Sensors and Actuators,2000,B66:256-259. |
| [11] | Horrillo M C;Serrini P;Manes L et al.Actuators[J].Sensors and Actuators,1997,B45:193-198. |
| [12] | Williams G;Coles G S V .[J].Sensors and Actuators,1995,B24-25:469-473. |
| [13] | Leo G;Rella R;Siciliano P et al.[J].Sensors and Actuators,1999,B58:370-374. |
| [14] | Brown JR.;Haycock PW.;Houlton DJ.;Jones AC.;Williams EW.;Cheney MT. .THE GAS-SENSING PROPERTIES OF TIN OXIDE THIN FILMS DEPOSITED BY METALLORGANIC CHEMICAL VAPOR DEPOSITION[J].Journal of the Electrochemical Society,1997(1):295-299. |
| [15] | Choe Y S .[J].Sensors and Actuators,2001,B77:200-208. |
| [16] | Jaegle M;Wollenstein J;Meisinger T et al.[J].Sensors and Actuators,1999,B57:130-134. |
| [17] | Madhusudhana Reddy M H .[J].Sensors and Actuators,1992,B9:1-8. |
| [18] | Tadeev A V;Delabouglise G;Labeau M .[J].Thin Solid Films,1999,337:163-165. |
| [19] | El Khakani M A;Dolbec R;Serventi A M et al.[J].Sensors and Actuators,2001,B77:383-388. |
| [20] | Cha K H;Park H C;Kim K H .[J].Sensors and Actuators,1994,B21:91-96. |
| [21] | De G;Licciulli A;Massaro C et al.[J].Sensors and Actuators,1999,B55:134-139. |
| [22] | Quaranta F;Rella R;Siciliano P et al.[J].Sensors and Actuators,1999,B55:350-355. |
| [23] | Ivanovskaya M;Bogdanov P;Faglia G et al.[J].Sensors and Actuators,2001,B77:268-274. |
| [24] | Cavicchi R E;Walton R M;Aquino-Class M et al.[J].Sensors and Actuators,2001,B77:145-154. |
| [25] | Tamaki J;Shimanoe K;Yamada Y et al.[J].Sensors and Actuators,1998,B49:121-125. |
| [26] | Fang G J;Liu Z L;Liu C Q .[J].Sensors and Actuators,2000,B66:46-48. |
| [27] | Cantalini C;Pelino M;Sun H T et al.[J].Sensors and Actuators,1996,B35/36:112-118. |
| [28] | Cantalini C;Wlodarski W;Li Y et al.[J].Sensors and Actuators,2000,B64:182-188. |
| [29] | Cantalini C;Sun H T;Faccio M et al.[J].Sensors and Actuators,1996,B31:81-87. |
| [30] | Smith D J;Vetelino J F;Falconer R S et al.[J].Sensors and Actuators,1993,B13/14:264-268. |
| [31] | Caron J J;Kenny T D;Legore L J.A Surface Acoustic Wave Nitric Oxide Sensor[C].Florida:IEEE Int Freq Control Symp Proc,1997:156-162. |
| [32] | Takada T.[M].Amsterdam,1988:59-70. |
| [33] | Steffes H;Imawan C;Solzbacher F et al.Actuators[J].Sensors and Actuators,2000,B68:249-253. |
| [34] | Gurlo A;Barsan N;Ivanovskaya M et al.Actuators[J].Sensors and Actuators,1998,B47:92-99. |
| [35] | Takao Y;Amita K;Shimizu Y.Proc 20th Chemical Sensor Sympoium[M].Tokyo,1995:25-28. |
| [36] | Yamaura H;Tamaki J;Moriga K et al.[J].Journal of the Electrochemical Society,1997,144:158-160. |
| [37] | Takami A .[J].Ceramic Bulletin,1988,67:1956-1960. |
| [38] | Guidi V;Carotta M C;Ferroni M et al.[J].Sensors and Actuators,1999,B57:197-200. |
| [39] | Xu C N;Tamaki J;Miura N et al.[J].Sensors and Actuators,1991,B3:147-155. |
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