研究飞秒激光烧蚀Ag膜表面,采用扫描电镜(SEM)观测其表面烧蚀形貌,发现烧蚀点大致分为3个区域,烧蚀面积随着脉冲能量的增大而增大,脉冲数的增加而增大,但当脉冲数达到一定值后烧蚀面积变化不大.改变脉冲数在烧蚀点得到了周期为650和150nm的长短周期条纹结构.根据烧蚀区域面积与脉冲能量的关系算出单脉冲与多脉冲的烧蚀阈值,Ag膜的单脉冲烧蚀阈值为0.189J/cm2.通过烧蚀点的累计能量和激光脉冲个数计算出Ag膜的多脉冲累计因子s=0.785.
参考文献
| [1] | Spence D E;Kean P N;Sibbett W .[J].Optics Letters,1991,16(01):42-44. |
| [2] | Dumit rù G;Romano V;Weber H P et al.[J].Applied Surface Science,2003,208-209(01):181-188. |
| [3] | Microscopic mechanisms of ablation and micromachining of dielectrics by using femtosecond lasers[J].Applied physics letters,2003(24):4382-4384. |
| [4] | Papakonstantinou P.;Fotakis C.;Vainos N.A. .Microfabrication by UV femtosecond laser ablation of Pt, Cr and indium oxide thin films[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,1999(3):159-170. |
| [5] | Crawford T H R;Haugen H K .[J].Applied Surface Science,2007,253:4970-4977. |
| [6] | Liu X.;Du D. .Laser ablation and micromachining with ultrashort laser pulses[J].IEEE Journal of Quantum Electronics: A Publication of the IEEE Quantum Electronics and Applications Society,1997(10):1706-1716. |
| [7] | Mannion P T;Magee J;Coyne E et al.[J].Applied Surface Science,2004,233(1-4):275-287. |
| [8] | Jasapara J;Nampoothiri A V V;Rudolph W .[J].Physical Review B,2001,63(04):045117. |
| [9] | Le Drogoff B;Vidal F;von Kaenel Y .[J].Applied Physics,2001,89(12):8247. |
| [10] | Femtosecond laser-induced periodic surface structure on diamond film[J].Applied physics letters,2003(11):1703-1705. |
| [11] | Borowiee A;Haugen H K .[J].Applied Physics Letters,2003,82(25):4462. |
| [12] | Bonse J;Munz M;Sturm H .[J].Journal of Applied Physics,2005,97:01353821-01353824. |
| [13] | Kruger J;Kautek W .[J].Advances in Polymer Science,2004,168:247-289. |
| [14] | Baudach S.;Kruger J.;Kautek W.;Bonse J. .Ultrashort pulse laser ablation of polycarbonate and polymethylmethacrylate[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2000(0):555-560. |
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