应用低能离子束辅助磁控溅射技术(IBAMS)沉积Cr-N薄膜,用场发射扫描电镜(FESEM)、原子力显微镜(AFM)和X射线衍射表征薄膜的组织结构,讨论了轰击能量对Cr-N薄膜组织、晶粒度以及硬度和断裂韧性的影响.结果表明:随离子束辅助轰击能量的升高,Cr-N薄膜由粗大的柱状晶变为细小的晶粒,当轰击能量达到1 200 V时,薄膜呈现等轴晶结构,薄膜致密度增加.FESEM得到的表面颗粒尺寸和AFM得到的粗糙度随轰击能量升高呈现相同的变化趋势,这些表观大颗粒是由许多小的亚晶块聚集而成.进一步用X射线衍射谱形分析表明:随轰击能量从0 V升高到800 V时,亚晶块的尺寸逐渐减小;到800 V时,晶块尺寸约为9 nm,但当能量升到1 200 V时,晶块尺寸反而增大,这是由离子束辅助轰击导致的两种不同机制而引起的,一种是离子轰击导致的喷丸碎化作用,而另一种为热效应引起的晶粒长大;当轰击能量从0 V增加800 V时,薄膜的硬度和断裂韧性都显著提高,与晶粒度的减小有关;而到1 200 V时,晶粒度较未辅助略大,但却具有很高的硬度以及较高的断裂韧性,说明硬度和断裂韧性的提高还与离子束轰击导致薄膜的致密化增加有关.
参考文献
| [1] | 孙宾 .陶瓷材料的韧性及增韧性的研究[J].济南大学学报,2000,10(05):12-14. |
| [2] | S. Neralla;D. Kumar;S. Yarmolenko;J. Sankar .Mechanical properties of nanocomposite metal-ceramic thin films[J].Composites, Part B. Engineering,2004(2):157-162. |
| [3] | M. Berger;U. Wiklund;M. Eriksson;H. Engqvist;S. Jacobson .The multilayer effect in abrasion -- optimising the combination of hard and tough phases[J].Surface & Coatings Technology,1999(0):1138-1144. |
| [4] | Ajay P. Malshe;Wenping Jiang;Ajit R. Dhamdhere .Nanostructured Coatings for Machining and Wear-Resistant Applications[J].JOM,2002(9):28-30. |
| [5] | S. Kamiya;H. Kimura;M. Saka;H. Abe .A new method for measurement of the toughness of brittle thin films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2001(1/2):180-186. |
| [6] | Emmanuelle Harry;Andre Rouzaud;Michel Ignat;Pierre Juliet .Mechanical properties of W and W(C) thin films: Young's modulus, fracture toughness and adhesion[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1998(1/2):195-201. |
| [7] | Wiklund U;Bromark M;Larsson M et al.Cracking resistance of thin hard coatings estimated by four-point bending[J].Surface and Coatings Technology,1997,91(1-2):57-63. |
| [8] | Lawn B R;Evans A G;Marshall D B .Elastic/plastic indentation damage in ceramics:the median/radial crack system[J].Journal of the American Ceramic Society,1980,63(9-10):574-581. |
| [9] | 刘伯威,樊毅,张金生,潘进.MoSi2复合材料断裂韧性的测量及评价[J].中国有色金属学报,2001(05):810-814. |
| [10] | Mehrotra P K;Quinto D T .Technique for evaluating mechanical properties of hard coatings[J].Journal of Vacuum Science and Technology,1985,3(06):2401-2405. |
| [11] | Harding D S;Oliver W C;Pharr G M .Cracking during nanoindentation and its use in the measurement of fracture toughness[J].Materials Research Society Symposium Proceedings,1995,356:663-668. |
| [12] | 离子束增强沉积制备CrNx薄膜[J].中国有色金属学报,1999(01):69. |
| [13] | 黄鹤,王学刚,朱晓东,陈华,何家文.离子束辅助磁控溅射沉积TiN薄膜的研究[J].稀有金属材料与工程,2002(03):205-208. |
| [14] | 范雄.金属X射线学[M].北京:机械工业出版社,1989 |
| [15] | 米彦郁,胡奈赛,何家文,陈华.对几种薄膜硬度测试方法的评定[J].中国表面工程,2002(03):20-23. |
| [16] | B. K. Tay;X. Shi;H. S. Yang;H. S. Tan;Daniel Chua;S. Y. Teo .The effect of deposition conditions on the properties of TiN thin films prepared by filtered cathodic vacuum-arc technique[J].Surface & Coatings Technology,1999(2/3):229-233. |
| [17] | Carter G .Peering in ion-assisted thin film deposition:a generalized model[J].Journal of Physics D:Applied Physics,1994,27(05):1046-1055. |
| [18] | Messier R;Giri A P;Roy R A .Recised structure zone model for thin film physical structure[J].Journal of Vacuum Science and Technology,1984,2(02):500-503. |
| [19] | Liu J C;LI J;Mayer J W .Temperature effect on ion-irradiation-induced grain growth in Cu thin films[J].Journal of Applied Physics,1990,67(05):2354-2358. |
| [20] | 石德珂;金志浩.材料力学性能[M].西安:西安交通大学出版社,1998 |
| [21] | Cocall C M;Hirvonen J K .Effect of ion energy on the mechanical properties of ion beam assisted deposition (IBAD) wear resistant coatings[J].Surface and Coatings Technology,1996,81(01):118-125. |
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