材料期刊网

本文采用俄罗斯UVN 0.5D2I离子束辅助电弧离子镀沉积设备，利用N离子束轰击高速钢W18Cr4V基材上电弧离子镀已沉积完毕的TiAlN膜层。研究了不同能量的N离子束轰击对TiAlN膜层表面形貌、显微硬度、相结构及膜层耐磨性的影响。SEM分析表明：TiAlN膜层表面“大颗粒”消失，凹坑浅而平整，粗糙度降低。X射线衍射分析表明：无N离子轰击时，TiAlN膜层是由TiAlN相和Ti2AlN相组成；随着轰击能量的增加，TiAlN膜层的相结构没有发生变化，但TiAlN（111）取向减弱，而（200）和（220）取向均增强；Ti2AlN（211）取向减弱。力学性能测试表明：N离子束轰击，使膜层的显微硬度由原来的2100HV0.01提高到2300HV0.01。摩擦磨损实验表明：N离子束轰击，降低了膜层的摩擦系数，明显地提高了膜层的耐磨性。

TiAlN coatings were deposited on W18Cr4V high speed steel substrate by ion beam assisted arc ion plating device made in Russia UVN 0.5D2I. the effects of such TiAlN coatings irradiated by Nitrogen ion beam with various energy on morphology, micro hardness, phase structure and wear performance were studied. SEM analysis revealed that the density of large metal particles on coatings surface was decreased obviously, craters distribution with shallow and uniform on irradiated surface resulted in the improvment of surface roughness. XRD analysis indicated that TiAlN layer was constituted by TiAlN and Ti2AlN phases without N ion beam bombarded, and there was no phase structure changed with irradiated energy increased, while TiAlN (111) crystal orientation reduced, as well as (200) and (220) increased and Ti2AlN (211) decreased. By means of ion beam irradiating, the hardness of irradiated coatings increased from 2100HV0.01 to 2300HV0.01. On the other hand , the friction coefficient of irradiated coatings decreased obviously.