利用电弧离子镀技术在不锈钢基体上制备了(Ti,A1)N涂层,研究了脉冲偏压对涂层残余应力沿层深分布及相关力学性能的影响.结果表明,(Ti,Al)N涂层残余应力沿层深呈“钟罩型”分布,且随脉冲偏压的增大应力值明显增加；通过对涂层生长结构及微观成分分析,初步探讨了应力分布机理.随脉冲偏压的增加,涂层硬度会显著增加,而膜/基结合力则先增加后减小；采用改变脉冲偏压的工艺制备(Ti,Al)N涂层,可有效调整涂层残余应力沿层深分布趋势,改善其力学性能.
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