氮化铁梯度薄膜的制备

材料研究学报, 1995, 9(1): 50-54.

氮化铁梯度薄膜的制备

天津大学

清华大学

基金项目: 国家自然科学基金

PREPARATION OF FUNCTIONALLY GRADIENT IRON NITRIDES THIN FILMS

JIANG Enyong , LIU Hui , LIU Mingsheng , LIN Chuan(Tianjin University)SUN Duochun(Tsinghua University)(Correspondent:JIANG Enyong , Department of Applied Physics

Keywords： :facing targets sputtering;iron nitrides thin films;functionally gradient thin films;Rutherford backscattering spectrometry , 氮化铁薄膜 , 梯度薄膜 , 卢瑟福背散射

用对向靶溅射仪制备了具有梯度结构的氮化铁薄膜材料.卢瑟福背散射分析结果表明,铁、氮两种原子的密度沿膜厚度方向呈梯度变化.在薄膜中有ζ-Fe2N,ε-FexN(2

In this paper. the functionally gradient iron nitrides thin films were prepared by facing targets sputtering. Rutherford backscattering spectrometry (RBS) demonstrates that the concentration of Fe or N atoms varies gradually from the substrate to the surf

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[8]	SugitaY,MitsuokaK,KomuroM,HoshiyaH,KozonoY,HanazonoM．JApplPhys,1991

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氮化铁梯度薄膜的制备

PREPARATION OF FUNCTIONALLY GRADIENT IRON NITRIDES THIN FILMS

参考文献