极性纤锌矿结构GaN外延薄膜生长时是沿着它的极性轴,主要是[0001]和[0001]方向的,而这两个极性方向对薄膜的生长、掺杂以及极性表面的化学特性有着不可忽略的影响.论述了GaN处延薄膜极性的检测和极性对薄膜生长的影响;同时回顾了与之相应的腐蚀、表面结构、晶体生长和器件的近期研究成果.
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