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为了提高金刚石的红外透过率,根据光干涉膜基础理论对薄膜增透进行了设计,获得了增透膜系的相关参数,并采用非规整设计中的彻底搜索法对所设计的膜系进行了增透效果分析.结果表明,在金刚石衬底上单面和双面镀Y_2O_3膜系后,透过率有明显提高.Y_2O_3膜系是性能优异的金刚石红外光学材料增透膜.

The antireflection of thin film was designed based on fundamental theories of optical interference coating to improve the infrared transmission of diamond.Some related parameters of the antireflective films were obtained.The antireflection effect was analyzed by the exhaustion method in inhomogeneous design for all thin films designed.The results showed that the transmission of diamond substrate coated with Y_2O_3 films on one or both sides were evidently increased.Y_2O_3 films can be used to fabricate excellent antireflective coatings for diamond as infrared optical materials.

参考文献

[1] 李大琪,刘定权,张凤山.6.4~15μm宽带增透膜的设计与制作[J].红外与毫米波学报,2006(02):135-137.
[2] 严一心;林鸿海.薄膜技术[M].北京:兵器工业出版社,1994
[3] T.P. Mollart;K.L. Lewis .Transition metal oxide anti-reflection coatings for airborne diamond optics[J].Diamond and Related Materials,2001(3-7):536-541.
[4] 朱嘉琦,韩杰才,胡超权,郑伟涛,韩潇,孟松鹤.非晶金刚石与非晶碳化锗复合增透保护膜系的设计与实现[J].红外与毫米波学报,2006(06):451-454.
[5] 闫锋 .射频磁控反应溅射法制备Y<,2>O<,3>薄膜的研究[D].西北工业大学,2006.
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