多晶硅薄膜结晶团晶化机理的研究

人工晶体学报, 2013, 42(2): 278-281.

1.南阳理工学院太阳能电池研究所,南阳473004;安彩高科股份有限公司博士后工作站,安阳455000;郑州大学物理工程学院,郑州450052

2.安彩高科股份有限公司博士后工作站,安阳455000

3.安彩高科股份有限公司博士后工作站,安阳455000

4.安彩高科股份有限公司博士后工作站,安阳455000

5.安彩高科股份有限公司博士后工作站,安阳455000

6.安彩高科股份有限公司博士后工作站,安阳455000

Research on the Formation Mechanism of Crystal Group in Fabricating Poly-Si Thin Film

本文用PECVD法在石英玻璃上沉积非晶硅薄膜,然后用快速光退火和传统电阻炉退火方法晶化生长多晶硅薄膜,用拉曼光谱仪、XRD和场发射扫描电镜观察分析薄膜,发现在制备的多晶硅薄膜表面存在结晶团现象,并对这一现象的晶化机理进行了分析.

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