激活温度对C-H体系低压金刚石生长条件的影响

无机材料学报, 1998, 13(3): 432-434.

激活温度对C-H体系低压金刚石生长条件的影响

刘志杰 , 张卫 , 万永中 , 王季陶

上海200433

Dept. of Electronic Engineering

CVD Lab.

Fudan University Shanghai 200433 China

关键词：激活温度 , diamond , C-H system , phase diagram

C-H System Low-Pressure Diamond Growth Condition influenced by Activation Temperature

LIU Zhi-Jie , ZHANG Wei , WAN Yong-Zhong , WANG Ji-Tao

Keywords： activation temperautre , 金刚石 , C－H体系 , 相图

本文根据非平衡热力学耦合模型计算了不同激活温度下的金刚石生长相图，研究了不同激活温度下金刚石生长区的变化．激活温度升高，金刚石生长区变大，有利于生长金刚石．对干不同的衬底温度，随激活温度的升高，金刚石生长区的变化也有所不同．

Diamond growth phase diagrams were calculated under different activation temperaturesbased on non-equilibrium thermodynamic coupling model. The diamond growth regions are enlarged with the increase of activation temperature. As to different substrate temperatures, thediamond growth regions exhibit different tendency with activation temperature rising.

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